Si-based MEMS resonant sensor: A review from microfabrication perspective

With the technological advancement in micro-electro-mechanical systems (MEMS), microfabrication processes along with digital electronics together have opened novel avenues to development of small-scale smart sensing devices improved sensitivity a lower cost fabrication and relatively small power consumption. This article aims provide overview recent work carried out on methodologies adopted develop silicon based resonant sensors. A detailed discussion has been understand critical steps involved silicon-based MEMS resonator. Some challenges starting from materials' selection final phase obtaining compact resonator device for its also explored critically.